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HVS VAC 04(TO39)
MEMS Type Pirani Vacuum Sensor
Pin Configuration (4 pins)
| Pin | Name | Type |
|---|---|---|
| 4 | CASE | passive |
| 3 | RP | passive |
| 2 | RK | passive |
| 1 | RP-RK | passive |
MEMS Type Pirani Vacuum Sensor
| Pin | Name | Type |
|---|---|---|
| 4 | CASE | passive |
| 3 | RP | passive |
| 2 | RK | passive |
| 1 | RP-RK | passive |